| Maintenance unit for a sensor apparatus ML Freed, RS Mundt, CJ Spanos US Patent 7,282,889, 2007 | 280* | 2007 |
| Sensor apparatus power transfer, communication and maintenance methods and apparatus ML Freed, RS Mundt, CJ Spanos US Patent 7,531,984, 2009 | 242 | 2009 |
| Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control ML Freed, RS Mundt, CJ Spanos US Patent 6,691,068, 2004 | 88 | 2004 |
| Methods and apparatus for power control ML Freed US Patent 6,671,660, 2003 | 44 | 2003 |
| Autonomous on-wafer sensors for process modeling, diagnosis, and control M Freed, M Kruger, CJ Spanos, K Poolla IEEE transactions on semiconductor manufacturing 14 (3), 255-264, 2001 | 43 | 2001 |
| Data collection methods and apparatus with parasitic correction ML Freed US Patent 6,789,034, 2004 | 38 | 2004 |
| Methods of and apparatuses for measuring electrical parameters of a plasma process RS Mundt, PD Macdonald, A Beers, ML Freed, CJ Spanos US Patent 7,960,670, 2011 | 34 | 2011 |
| Methods and apparatus for low power delay control ML Freed US Patent 6,971,036, 2005 | 30 | 2005 |
| Methods of and apparatuses for maintenance, diagnosis, and optimization of processes PD MacDonald, MVP Krüger, M Welch, ML Freed, CJ Spanos US Patent 7,580,767, 2009 | 21 | 2009 |
| Methods and apparatus for low distortion parameter measurements D Hunt, CJ Spanos, M Welch, K Poolla, ML Freed US Patent 7,299,148, 2007 | 17 | 2007 |
| Wafer-grown heat flux sensor arrays for plasma etch processes M Freed, MVP Kruger, K Poolla, CJ Spanos IEEE transactions on semiconductor manufacturing 18 (1), 148-162, 2005 | 12 | 2005 |
| Apparatuses for and methods of monitoring optical radiation parameters for substrate processing operations RS Mundt, A Beers, PD Macdonald, ML Freed, D Hunt US Patent 7,482,576, 2009 | 7 | 2009 |
| Real time in-situ data acquisition using autonomous on-wafer sensor arrays M Freed, M Kruger, K Poolla, C Spanos Proceedings of ISSM2000. Ninth International Symposium on Semiconductor …, 2000 | 6 | 2000 |
| Autonomous micro-sensor arrays for process control of semiconductor manufacturing processes D Fisher, M Freed, C Spanos, K Poolla Proceedings of the 38th IEEE Conference on Decision and Control (Cat. No …, 1999 | 6 | 1999 |
| Presented: 1999 IEEE International Conference on Control Applications, Aug. 22-26, 1999 D Fisher, M Freed, K Poolla, CJSUC Berkeley Presentation on Aug 24, 1999 | 6 | 1999 |
| Presented: Proceedings of the 38th Conference on Decision and Control-Dec. 7-10, 1999 D Fisher, M Freed, K Poolla, CJSUC Berkeley Presentation on Dec 10, 1999 | 6 | 1999 |
| Micro-sensor arrays for calibration, control, and monitoring of semiconductor manufacturing processes D Fisher, M Freed, C Spanos, K Poolla Proceedings of the 1999 IEEE International Conference on Control …, 1999 | 5 | 1999 |
| Methods of and apparatuses for maintenance, diagnosis, and optimization of processes RS Mundt, PD MacDonald, A Beers, ML Freed, CJ Spanos US Patent 8,698,037, 2014 | 2 | 2014 |
| Methods of and apparatuses for maintenance, diagnosis, and optimization of processes PD MacDonald, MVP Kruger, M Welch, ML Freed, CJ Spanos US Patent App. 12/538,066, 2009 | 2 | 2009 |
| In-situ etch rate sensor arrays for plasma etch processes M Freed Electronics Research Laboratory, College of Engineering, University of …, 1999 | 2 | 1999 |
