متابعة
Michael DiBattista
Michael DiBattista
Varioscale, Inc
بريد إلكتروني تم التحقق منه على varioscale.com
عنوان
عدد مرات الاقتباسات
عدد مرات الاقتباسات
السنة
Peculiarities of SnO2 thin film deposition by spray pyrolysis for gas sensor application
G Korotcenkov, V Brinzari, J Schwank, M DiBattista, A Vasiliev
Sensors and Actuators B: Chemical 77 (1-2), 244-252, 2001
2412001
Structural characterization of SnO2 gas sensing films deposited by spray pyrolysis
G Korotcenkov, M DiBattista, J Schwank, V Brinzari
Materials Science and Engineering: B 77 (1), 33-39, 2000
742000
Localized backside chip cooling with integrated smart valves
M DiBattista, RH Livengood
US Patent 6,825,557, 2004
682004
Oxygen sensors: materials and applications
JW Schwank, M DiBattista
MRS Bulletin 24 (6), 44-48, 1999
561999
Adjusting the frequency of film bulk acoustic resonators
LP Wang, Q Ma, Q Tran, T Rini, M DiBattista
US Patent App. 10/201,796, 2004
462004
Steps toward automated deprocessing of integrated circuits
EL Principe, N Asadizanjani, D Forte, M Tehranipoor, R Chivas, ...
ISTFA 2017: Proceedings from the 43rd International Symposium for Testing …, 2017
382017
Determination of diffusion in polycrystalline platinum thin films
M DiBattista, JW Schwank
Journal of applied physics 86 (9), 4902-4907, 1999
371999
Hot stage for scanning probe microscope
M DiBattista, SV Patel, JL Gland, JW Schwank
US Patent 5,731,587, 1998
311998
Survivability of a silicon-based microelectronic gas-detector structure for high-temperature flow applications
SV Patel, M DiBattista, JL Gland, JW Schwank
Sensors and Actuators B: Chemical 37 (1-2), 27-35, 1996
251996
Method to direct pattern metals on a substrate
T Holtermann, A Graupera, M DiBattista
US Patent 8,278,220, 2012
242012
In-situ elevated temperature imaging of thin films with a microfabricated hot stage for scanning probe microscopes
M DiBattista, SV Patel, JF Mansfield, JW Schwank
Applied surface science 141 (1-2), 119-128, 1999
211999
Plasma FIB deprocessing of integrated circuits from the backside
EL Principe, N Asadizanjani, D Forte, M Tehranipoor, R Chivas, ...
FICS Research Annual Conference on Cybersecurity, 2017
152017
Adaptive Grinding and Polishing of Silicon Integrated Circuits to Ultra-thin Remaining Thickness
R Chivas, S Silverman, M DiBattista
ISTFA 2015, 460-465, 2015
142015
Adjusting the frequency of film bulk acoustic resonators
LP Wang, M DiBattista, S Fortuna, Q Ma, V Rao
US Patent 6,975,184, 2005
142005
Method and apparatus for controlling material removal from a semiconductor substrate using induced current endpointing
RH Livengood, P Winer, G Woods, M DiBattista
US Patent 6,355,494, 2002
132002
Fast, full chip image stitching of nanoscale integrated circuits
D Zhang, G Van Der Wal, P Miller, D Stoker, E Matlin, N Marri, G Gan, ...
Technical report, 2019
112019
Preparation of Wafer Level Packaged Integrated Circuits Using Pulsed Laser Assisted Chemical Etching
R Chivas, N Dandekar, S Silverman, R Cruz, M DiBattista
ISTFA 2012, 491-497, 2012
92012
Microwave Frequency Signal Propagation in Backside Focused Ion Beam (FIB) Fabricated Interconnects
JA Rowlette, M DiBattista, S Fortuna, RH Livengood
ISTFA 2002, 559-568, 2002
92002
Electrical contacts to nanomaterials
PR Bandaru, H Faraby, M DiBattista
Journal of nanoscience and nanotechnology 15 (12), 9315-9329, 2015
82015
Three-dimensional nanoscale mapping of state-of-the-art field-effect transistors (FinFETs)
P Parikh, C Senowitz, D Lyons, I Martin, TJ Prosa, M DiBattista, A Devaraj, ...
Microscopy and Microanalysis 23 (5), 916-925, 2017
72017
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مقالات 1–20