Yoshio MITA
Yoshio MITA
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Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures
F Marty, L Rousseau, B Saadany, B Mercier, O Français, Y Mita, ...
Microelectronics journal 36 (7), 673-677, 2005
Design, fabrication, and control of MEMS-based actuator arrays for air-flow distributed micromanipulation
Y Fukuta, YA Chapuis, Y Mita, H Fujita
Journal of Microelectromechanical Systems 15 (4), 912-926, 2006
Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon
B Saadany, M Malak, M Kubota, F Marty, Y Mita, D Khalil, T Bourouina
IEEE journal of selected topics in quantum electronics 12 (6), 1480-1488, 2006
A silicon shadow mask for deposition on isolated areas
A Tixier, Y Mita, JP Gouy, H Fujita
Journal of Micromechanics and Microengineering 10 (2), 157, 2000
FPGA-based decentralized control of arrayed MEMS for microrobotic application
YA Chapuis, L Zhou, Y Fukuta, Y Mita, H Fujita
IEEE Transactions on Industrial Electronics 54 (4), 1926-1936, 2007
Micro-mirror device
M Tsugai, N Konno, H Fujita, M Mita, H Toshiyoshi, Y Mita
US Patent 6,259,548, 2001
Embedded-mask-methods for mm-scale multi-layer vertical/slanted Si structures
Y Mita, M Mita, A Tixier, JP Gouy, H Fujita
Proceedings IEEE Thirteenth Annual International Conference on Micro Electro …, 2000
Conveyor for pneumatic two-dimensional manipulation realized by arrayed MEMS and its control
Y Fukuta, M Yanada, A Ino, Y Mita, YA Chapuis, S Konishi, H Fujita
Journal of Robotics and Mechatronics 16 (2), 163-170, 2004
Two dimensional micro conveyance system with through holes for electrical and fluidic interconnection
Y Mita, S Konishi, H Fujita
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
Aspect ratio dependent scalloping attenuation in DRIE and an application to low-loss fiber-optical switches
Y Mita, M Sugiyama, M Kubota, F Marty, T Bourouina, T Shibata
19th IEEE international conference on micro electro mechanical systems, 114-117, 2006
A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring
RR Reddy, K Komeda, Y Okamoto, E Lebrasseur, A Higo, Y Mita
Sensors and Actuators A: Physical 295, 1-10, 2019
An intelligent action control system based on extended vector annotated logic program and its hardware implementation
K Nakamatsu, Y Mita, T Shibata
Intelligent Automation & Soft Computing 13 (3), 289-304, 2007
Multiple-height microstructures fabricated by ICP-RIE and embedded masking layers
M Mita, Y Mita, H Toshiyoshi, H Fujita
IEEJ Transactions on Sensors and Micromachines 120 (11), 493-497, 2000
Method for fine pattern formation
H Fujita, Y Mita, R Ohigashi, K Tsuchiya
US Patent 6,767,473, 2004
Demonstration of a wireless driven MEMS pond skater that uses EWOD technology
Y Mita, Y Li, M Kubota, S Morishita, W Parkes, LI Haworth, BW Flynn, ...
Solid-State Electronics 53 (7), 798-802, 2009
Contour lithography methods for DRIE fabrication of nanometre–millimetre-scale coexisting microsystems
Y Mita, M Kubota, T Harada, F Marty, B Saadany, T Bourouina, T Shibata
Journal of Micromechanics and Microengineering 16 (6), S135, 2006
Noninvasive localization of IGBT faults by high-sensitivity magnetic probe with RF stimulation
NN Mai-Khanh, S Nakajima, T Iizuka, Y Mita, K Asada
IEEE Transactions on Instrumentation and Measurement 67 (4), 745-753, 2018
Thermal resonant zeolite-based gas sensor
M Denoual, D Robbes, S Inoue, Y Mita, J Grand, H Awala, S Mintova
Sensors and Actuators B: Chemical 245, 179-182, 2017
Increasing cell–device adherence using cultured insect cells for receptor-based biosensors
D Terutsuki, H Mitsuno, T Sakurai, Y Okamoto, A Tixier-Mita, H Toshiyoshi, ...
Royal Society Open Science 5 (3), 172366, 2018
Opportunities of CMOS-MEMS integration through LSI foundry and open facility
Y Mita, E Lebrasseur, Y Okamoto, F Marty, R Setoguchi, K Yamada, I Mori, ...
Japanese Journal of Applied Physics 56 (6S1), 06GA03, 2017
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