متابعة
Winand Slingenbergh
Winand Slingenbergh
University of Groningen
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عنوان
عدد مرات الاقتباسات
عدد مرات الاقتباسات
السنة
Focused helium and neon ion beam induced etching for advanced extreme ultraviolet lithography mask repair‏
CM Gonzalez, R Timilsina, G Li, G Duscher, PD Rack, W Slingenbergh, ...‏
Journal of Vacuum Science & Technology B 32 (2), 2014‏
412014
Evaluation of mask repair strategies via focused electron, helium, and neon beam induced processing for EUV applications‏
CM Gonzalez, W Slingenbergh, R Timilsina, JH Noh, MG Stanford, ...‏
Extreme Ultraviolet (EUV) Lithography V 9048, 135-141, 2014‏
192014
Selective functionalization of tailored nanostructures‏
W Slingenbergh, SK de Boer, T Cordes, WR Browne, BL Feringa, ...‏
ACS nano 6 (10), 9214-9220, 2012‏
182012
Selective functionalization of patterned glass surfaces‏
E Ploetz, B Visser, W Slingenbergh, K Evers, D Martinez-Martinez, YT Pei, ...‏
Journal of Materials Chemistry B 2 (17), 2606-2615, 2014‏
152014
The selective functionalization of small electron-beam-induced SiOx deposits by self-assembly‏
W Slingenbergh‏
Faculty of Science and Engineering, 2012‏
2012
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مقالات 1–5