Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer R Mukhiya, P Agarwal, S Badjatya, M Garg, P Gaikwad, S Sinha, ... Microsystem technologies 25, 3521-3532, 2019 | 45 | 2019 |
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring M Garg, DS Arya, S Sharma, S Kumar, W Uddin, S Das, Y Chiu, P Singh Journal of Microelectromechanical Systems 30 (3), 340-342, 2021 | 14 | 2021 |
Electrical equivalent modeling of MEMS differential capacitive accelerometer R Mukhiya, M Garg, P Gaikwad, S Sinha, AK Singh, R Gopal Microelectronics Journal 99, 104770, 2020 | 12 | 2020 |
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization M Garg, DS Arya, S Kumar, M Yousuf, Y Chiu, P Singh Journal of Micromechanics and Microengineering 32 (7), 075004, 2022 | 9 | 2022 |
Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film M Garg, DS Arya, S Kumar, Y Chiu, P Singh Applied Physics Letters 120 (8), 2022 | 9 | 2022 |
On the notion of vdW-force loaded hysteretic switching for precise release voltage design in all-metal electrostatic logic relay S Kumar, DS Arya, KS Raghav, M Garg, P Singh Sensors and Actuators A: Physical 328, 112785, 2021 | 7 | 2021 |
Reducing dynamism in DRAM with bistable MEMS switch as sleep transistor DS Arya, S Kumar, M Garg, N Chourasiya, P Singh IEEE Transactions on Electron Devices 68 (3), 1045-1049, 2021 | 6 | 2021 |
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM DS Arya, S Kumar, M Garg, P Singh Journal of Microelectromechanical Systems 30 (5), 683-685, 2021 | 4 | 2021 |
Skin-Inspired Bimodal Magneto-Dielectric-Based Flexible and Sensitive Capacitive Sensor for Limb Motion Tracking M Yousuf, M Garg, DS Arya, P Singh IEEE Transactions on Electron Devices 70 (3), 1338-1343, 2023 | 3 | 2023 |
Asymmetric capacitive pixel array (E-CaP) for mapping of epidermal vectored movement M Yousuf, DS Arya, M Garg, D Varshney, P Singh IEEE Journal on Flexible Electronics 1 (2), 134-140, 2022 | 3 | 2022 |
A Sensitive and Flexible Poroelastic Barium Titanate Matrix for Pressure Sensing Applications M Yousuf, NT Beigh, DS Arya, M Garg, D Mallick, P Singh IEEE Sensors Letters 7 (2), 1-4, 2023 | 2 | 2023 |
Adhesion-limit in refractory transition metal (Mo) contact relay operation at 300° C—avoiding overestimation for modern ICs S Kumar, DS Arya, M Garg, P Singh 2022 IEEE International Reliability Physics Symposium (IRPS), P17-1-P17-4, 2022 | 2 | 2022 |
Effect of Operational-Mode (PI/NPI) and Temperature (> 150° C) on Hysteresis Voltage in Low-Power MEMS Logic Relay S Kumar, DS Arya, KS Raghav, M Garg, P Singh 2020 5th IEEE International Conference on Emerging Electronics (ICEE), 1-4, 2020 | 2 | 2020 |
Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range M Garg, DS Arya, S Kumar, K Joshi, M Yousuf, Y Chiu, P Singh Journal of Micromechanics and Microengineering 34 (2), 025003, 2024 | 1 | 2024 |
TiN-C based CMOS MEMS Pirani gauge for on-chip pressure measurement M Garg, FW Tsai, K Joshi, Y Chiu, P Singh 2023 IEEE SENSORS, 1-4, 2023 | 1 | 2023 |
Modeling the anchor effect for estimating performance metrics of a MEMS Pirani gauge M Garg, S Kumar, DS Arya, M Yousuf, Y Chiu, P Singh 2022 IEEE Sensors, 1-4, 2022 | 1 | 2022 |
Electrothermal analysis of a simple MEMS Pirani Gauge with a lower detection limit A Kumari, M Garg, P Kumar, P Singh 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-3, 2024 | | 2024 |
Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization M Garg, P Singh, Y Chiu IEEE Transactions on Electron Devices, 2023 | | 2023 |
CMOS MEMS Resonator for Physical Reservoir Computing Y Chiu, FW Tsai, LK Wang, YC Lee, M Garg, HC Hong 2023 IEEE SENSORS, 1-4, 2023 | | 2023 |
Multi Heat-Sink CMOS-BEOL Integrated MEMS Pirani Gauge for Vacuum Detection in Packaged Microsensors M Garg, FW Tsai, S Kumar, Y Chiu, P Singh 2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023 | | 2023 |