Follow
MANU GARG
Title
Cited by
Cited by
Year
Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer
R Mukhiya, P Agarwal, S Badjatya, M Garg, P Gaikwad, S Sinha, ...
Microsystem technologies 25, 3521-3532, 2019
452019
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring
M Garg, DS Arya, S Sharma, S Kumar, W Uddin, S Das, Y Chiu, P Singh
Journal of Microelectromechanical Systems 30 (3), 340-342, 2021
142021
Electrical equivalent modeling of MEMS differential capacitive accelerometer
R Mukhiya, M Garg, P Gaikwad, S Sinha, AK Singh, R Gopal
Microelectronics Journal 99, 104770, 2020
122020
Stress engineered SU-8 dielectric-microbridge based polymer MEMS Pirani gauge for broad range hermetic characterization
M Garg, DS Arya, S Kumar, M Yousuf, Y Chiu, P Singh
Journal of Micromechanics and Microengineering 32 (7), 075004, 2022
92022
Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film
M Garg, DS Arya, S Kumar, Y Chiu, P Singh
Applied Physics Letters 120 (8), 2022
92022
On the notion of vdW-force loaded hysteretic switching for precise release voltage design in all-metal electrostatic logic relay
S Kumar, DS Arya, KS Raghav, M Garg, P Singh
Sensors and Actuators A: Physical 328, 112785, 2021
72021
Reducing dynamism in DRAM with bistable MEMS switch as sleep transistor
DS Arya, S Kumar, M Garg, N Chourasiya, P Singh
IEEE Transactions on Electron Devices 68 (3), 1045-1049, 2021
62021
Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM
DS Arya, S Kumar, M Garg, P Singh
Journal of Microelectromechanical Systems 30 (5), 683-685, 2021
42021
Skin-Inspired Bimodal Magneto-Dielectric-Based Flexible and Sensitive Capacitive Sensor for Limb Motion Tracking
M Yousuf, M Garg, DS Arya, P Singh
IEEE Transactions on Electron Devices 70 (3), 1338-1343, 2023
32023
Asymmetric capacitive pixel array (E-CaP) for mapping of epidermal vectored movement
M Yousuf, DS Arya, M Garg, D Varshney, P Singh
IEEE Journal on Flexible Electronics 1 (2), 134-140, 2022
32022
A Sensitive and Flexible Poroelastic Barium Titanate Matrix for Pressure Sensing Applications
M Yousuf, NT Beigh, DS Arya, M Garg, D Mallick, P Singh
IEEE Sensors Letters 7 (2), 1-4, 2023
22023
Adhesion-limit in refractory transition metal (Mo) contact relay operation at 300° C—avoiding overestimation for modern ICs
S Kumar, DS Arya, M Garg, P Singh
2022 IEEE International Reliability Physics Symposium (IRPS), P17-1-P17-4, 2022
22022
Effect of Operational-Mode (PI/NPI) and Temperature (> 150° C) on Hysteresis Voltage in Low-Power MEMS Logic Relay
S Kumar, DS Arya, KS Raghav, M Garg, P Singh
2020 5th IEEE International Conference on Emerging Electronics (ICEE), 1-4, 2020
22020
Electrostatically actuated all metal MEMS Pirani gauge with tunable dynamic range
M Garg, DS Arya, S Kumar, K Joshi, M Yousuf, Y Chiu, P Singh
Journal of Micromechanics and Microengineering 34 (2), 025003, 2024
12024
TiN-C based CMOS MEMS Pirani gauge for on-chip pressure measurement
M Garg, FW Tsai, K Joshi, Y Chiu, P Singh
2023 IEEE SENSORS, 1-4, 2023
12023
Modeling the anchor effect for estimating performance metrics of a MEMS Pirani gauge
M Garg, S Kumar, DS Arya, M Yousuf, Y Chiu, P Singh
2022 IEEE Sensors, 1-4, 2022
12022
Electrothermal analysis of a simple MEMS Pirani Gauge with a lower detection limit
A Kumari, M Garg, P Kumar, P Singh
2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM), 1-3, 2024
2024
Nanogap CMOS-MEMS Pirani Gauge Based on Titanium-Nitride Heating Element for Broad-Range Vacuum Characterization
M Garg, P Singh, Y Chiu
IEEE Transactions on Electron Devices, 2023
2023
CMOS MEMS Resonator for Physical Reservoir Computing
Y Chiu, FW Tsai, LK Wang, YC Lee, M Garg, HC Hong
2023 IEEE SENSORS, 1-4, 2023
2023
Multi Heat-Sink CMOS-BEOL Integrated MEMS Pirani Gauge for Vacuum Detection in Packaged Microsensors
M Garg, FW Tsai, S Kumar, Y Chiu, P Singh
2023 22nd International Conference on Solid-State Sensors, Actuators and …, 2023
2023
The system can't perform the operation now. Try again later.
Articles 1–20