متابعة
Jörn-Holger Franke
Jörn-Holger Franke
بريد إلكتروني تم التحقق منه على imec.be
عنوان
عدد مرات الاقتباسات
عدد مرات الاقتباسات
السنة
Linear alkane polymerization on a gold surface
D Zhong, JH Franke, SK Podiyanachari, T Blömker, H Zhang, G Kehr, ...
Science 334 (6053), 213-216, 2011
3582011
Glaser coupling at metal surfaces
HY Gao, H Wagner, D Zhong, JH Franke, A Studer, H Fuchs
Angewandte Chemie International Edition 52 (14), 4024-4028, 2013
3302013
Electronic structure of spatially aligned graphene nanoribbons on Au (788)
S Linden, D Zhong, A Timmer, N Aghdassi, JH Franke, H Zhang, X Feng, ...
Physical review letters 108 (21), 216801, 2012
2652012
On-surface azide–alkyne cycloaddition on Au (111)
O Diaz Arado, H Mönig, H Wagner, JH Franke, G Langewisch, PA Held, ...
ACS nano 7 (10), 8509-8515, 2013
1252013
Effect of metal surfaces in on-surface Glaser coupling
HY Gao, JH Franke, H Wagner, D Zhong, PA Held, A Studer, H Fuchs
The Journal of Physical Chemistry C 117 (36), 18595-18602, 2013
1042013
Surface Supported Gold–Organic Hybrids: On‐Surface Synthesis and Surface Directed Orientation
H Zhang, JH Franke, D Zhong, Y Li, A Timmer, OD Arado, H Mönig, ...
Small 10 (7), 1361-1368, 2014
722014
Role of the van der Waals interactions on the bonding mechanism of pyridine on Cu (110) and Ag (110) surface: First-principles study
N Atodiresei, V Caciuc, JH Franke, S Blügel
Physical Review B 78 (4), 045411, 2008
682008
SAQP and EUV block patterning of BEOL metal layers on IMEC's iN7 platform
J Bekaert, P Di Lorenzo, M Mao, S Decoster, S Larivière, JH Franke, ...
Extreme Ultraviolet (EUV) Lithography VIII 10143, 73-87, 2017
342017
Improving exposure latitudes and aligning best focus through pitch by curing M3D phase effects with controlled aberrations
JH Franke, J Bekaert, V Blanco, L Van Look, F Wahlisch, K Lyakhova, ...
International Conference on Extreme Ultraviolet Lithography 2019 11147, 50-69, 2019
222019
Manipulating surface diffusion ability of single molecules by scanning tunneling microscopy
DY Zhong, J Franke, T Blomker, G Erker, LF Chi, H Fuchs
Nano Letters 9 (1), 132-136, 2009
192009
Metal layer single EUV expose at pitch 28 nm: how bright field and NTD resist advantages align
JH Franke, A Frommhold, N Davydova, R Aubert, VV Nair, T Kovalevich, ...
Extreme Ultraviolet (EUV) Lithography XII 11609, 43-62, 2021
182021
On-surface reductive coupling of aldehydes on Au (111)
OD Arado, H Mönig, JH Franke, A Timmer, PA Held, A Studer, H Fuchs
Chemical communications 51 (23), 4887-4890, 2015
182015
Fundamental understanding and experimental verification of bright versus dark field imaging
N Davydova, J Finders, J McNamara, E van Setten, C van Lare, ...
Extreme Ultraviolet Lithography 2020 11517, 40-57, 2020
162020
Adsorption of lactic acid on chiral Pt surfaces—A density functional theory study
JH Franke, DS Kosov
The Journal of Chemical Physics 138 (8), 2013
152013
Towards high NA patterning readiness: materials, processes and etch transfer for P24 Line Space
A Thiam, JG Santaclara, JH Franke, F Schleicher, R Blanc, P Bezard, ...
International Conference on Extreme Ultraviolet Lithography 2021 11854, 32-45, 2021
122021
Extending 0.33 NA EUVL to 28 nm pitch using alternative mask and controlled aberrations
D Rio, P Van Adrichem, M Delorme, K Lyakhova, C Spence, JH Franke
Extreme Ultraviolet (EUV) Lithography XII 11609, 63-78, 2021
102021
Tomorrow’s pitches on today’s 0.33 NA scanner: pupil and imaging conditions to print P24 L/S and P28 contact holes
JH Franke, N Davydova, J Bekaert, V Wiaux, VV Nair, A van Dijk, E Wang, ...
Extreme Ultraviolet Lithography 2020 11517, 115-127, 2021
102021
Adsorption and bonding mechanism of a N, N′-di (n-butyl) quinacridone monolayer studied by density functional theory including semiempirical dispersion corrections
JH Franke, V Caciuc, LF Chi, H Fuchs
Physical Review B 78 (16), 165432, 2008
102008
Adsorption and bonding mechanism of a N, N′-di (n-butyl) quinacridone monolayer studied by density functional theory including semiempirical dispersion corrections
JH Franke, V Caciuc, LF Chi, H Fuchs
Physical Review B 78 (16), 165432, 2008
102008
Self-aligned block and fully self-aligned via for iN5 metal 2 self-aligned quadruple patterning
B Vincent, JH Franke, A Juncker, F Lazzarino, G Murdoch, S Halder, ...
Extreme Ultraviolet (EUV) Lithography IX 10583, 221-231, 2018
92018
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مقالات 1–20