| Dual-mode AlN-on-silicon micromechanical resonators for temperature sensing JL Fu, R Tabrizian, F Ayazi IEEE Transactions on Electron Devices 61 (2), 591-597, 2014 | 54 | 2014 |
| One-dimensional linear acoustic bandgap structures for performance enhancement of AlN-on-Silicon micromechanical resonators L Sorenson, JL Fu, F Ayazi 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 52 | 2011 |
| Multi-Axis ALN-on-Silicon Vibration Energy Harvester with Integrated Frequency-Upconverting Transducers J Fu, Y Nakano, L Sorenson, F Ayazi IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012 …, 2012 | 30 | 2012 |
| Dual-mode piezo-on-silicon resonant temperature and humidity sensor for portable air quality monitoring systems JL Fu, F Ayazi SENSORS, 2010 IEEE, 2131-2135, 2010 | 23 | 2010 |
| Piezoelectric micromechanical energy harvesters F Ayazi, L Sorenson, J Fu US Patent 8,680,752, 2014 | 15 | 2014 |
| Simultaneous dual-mode excitation of piezo-on-silicon micromechanical oscillator for self-temperature sensing MJ Dalal, JL Fu, F Ayazi 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011 | 15 | 2011 |
| High-AlN-on-Silicon Resonators With Annexed Platforms for Portable Integrated VOC Sensing JL Fu, F Ayazi Journal of Microelectromechanical Systems 24 (2), 503-509, 2014 | 13 | 2014 |
| Linear acoustic bandgap arrays for spurious mode suppression in piezoelectric MEMS resonators L Sorenson, J Fu, F Ayazi 2011 Joint Conference of the IEEE International Frequency Control and the …, 2011 | 10 | 2011 |
| Metal-organic thin-film encapsulation for MEMS J Fang, J Fu, F Ayazi Journal of micromechanics and microengineering 18 (10), 105002, 2008 | 8 | 2008 |
| Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers F Ayazi, L Sorenson, J Fu US Patent 8,624,471, 2014 | 5 | 2014 |
| Metal-Organic Thin-Film Encapsulation for Gravimetric Gas Microsensors J Fang, J Fu, F Ayazi 12th International Conference on Miniaturized Systems for Chemistry and Life …, 2008 | 2 | 2008 |
| Micromachined piezoelectric-on-silicon platform for resonant sensing and energy harvesting JL Fu Georgia Institute of Technology, 2013 | | 2013 |
Dr. Farrokh AyaziDirector, Center for MEMS and Microsystems Technologies, Georgia Institute of TechnologyVerified email at gatech.edu
