| Multi-layer plasma resistant coating by atomic layer deposition X Wu, D Fenwick, JY Sun, G Zhan US Patent 10,573,497, 2020 | 188 | 2020 |
| Metal oxy-flouride films based on oxidation of metal flourides X Wu, D Fenwick, G Zhan, JY Sun, MR Rice US Patent 10,563,303, 2020 | 187 | 2020 |
| Fluorinated rare earth oxide ald coating for chamber productivity enhancement X Wu, D Fenwick, JY Sun US Patent App. 15/903,103, 2019 | 184 | 2019 |
| Flourination process to create sacrificial oxy-flouride layer X Wu, D Fenwick, G Zhan, JY Sun, MR Rice US Patent 10,443,125, 2019 | 182 | 2019 |
| Metal oxy-flouride films for chamber components X Wu, D Fenwick, G Zhan, JY Sun, MR Rice US Patent App. 15/965,810, 2018 | 181 | 2018 |
| A novel nano-scale non-contact temperature measurement technique for crystalline materials X Wu, R Hull Nanotechnology 23 (46), 465707, 2012 | 20 | 2012 |
| Colour tuning of core–shell fluorescent materials L Li, J Tao, H Pan, H Chen, X Wu, F Zhu, X Xu, T Ruikang Journal of Materials Chemistry 18 (44), 5363-5367, 2008 | 14 | 2008 |
| Multi-layer plasma resistant coating by atomic layer deposition X Wu, D Fenwick, JY Sun, G Zhan US Patent 10,186,400, 2019 | 13 | 2019 |
| Multi-layer plasma resistant coating by atomic layer deposition X Wu, D Fenwick, JY Sun, G Zhan US Patent 10,186,400, 2019 | 13 | 2019 |
| Multi-layer coating with diffusion barrier layer and erosion resistant layer D Fenwick, X Wu, JY Sun US Patent App. 15/646,602, 2018 | 12 | 2018 |
| Multi-layer plasma erosion protection for chamber components T Tran, L Kalita, TW Kim, D Lubomirsky, X Wu, XM He, CH Chou, JY Sun US Patent 10,755,900, 2020 | 10 | 2020 |
| The material dependence of temperature measurement resolution in thermal scanning electron microscopy X Wu, R Hull Applied Physics Letter 102 (11), 113107, 2013 | 8 | 2013 |
| Corrosion resistant ground shield of processing chamber D Lubomirsky, XM He, JY Sun, X Wu, L Kalita, S Park US Patent 11,562,890, 2023 | 6 | 2023 |
| High spatial resolution non-contact temperature measurement X Wu, R Hull US Patent 8,809,783, 2014 | 6 | 2014 |
| Zone-controlled rare-earth oxide ALD and CVD coatings X Wu, JY Sun, MR Rice US Patent 10,443,126, 2019 | 5 | 2019 |
| Rare-earth-based oxyfluoride ald coating for chamber productivity enhancement X Wu, D Fenwick, JY Sun, MR Rice US Patent App. 16/108,195, 2019 | 4 | 2019 |
| Cold spray coating with sacrificial filler powder X Wu, JY Sun US Patent App. 15/965,797, 2019 | 3 | 2019 |
| Nanopowders, nanoceramic materials and methods of making and use thereof G Zhan, X Wu, XM He, JY Sun US Patent 11,279,656, 2022 | 2 | 2022 |
| Atomic layer deposition coatings for high temperature ceramic components X Wu, JY Sun, MR Rice US Patent 11,180,847, 2021 | 2 | 2021 |
| Metal oxy-flouride films based on oxidation of metal flourides X Wu, D Fenwick, G Zhan, JY Sun, MR Rice US Patent App. 16/734,705, 2020 | 2 | 2020 |
