Follow
Moataz Bellah M. Mousa
Moataz Bellah M. Mousa
Unknown affiliation
Verified email at ncsu.edu
Title
Cited by
Cited by
Year
Method of forming an electrode on a substrate and a semiconductor device structure including an electrode
MB Mousa, PF Hsu, W Johnson, P Raisanen
US Patent 10,847,371, 2020
3312020
Method of forming a doped metal carbide film on a substrate and related semiconductor device structures
D Li, PF Hsu, P Raisanen, MB Mousa, W Johnson, X Chen
US Patent 11,056,567, 2021
3152021
Effect of temperature and gas velocity on growth per cycle during Al2O3 and ZnO atomic layer deposition at atmospheric pressure
MBM Mousa, CJ Oldham, JS Jur, GN Parsons
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 30 (1 …, 2012
732012
Atmospheric Pressure Atomic Layer Deposition of Al2O3 Using Trimethyl Aluminum and Ozone
MBM Mousa, CJ Oldham, GN Parsons
Langmuir 30 (13), 3741-3748, 2014
522014
Modeling and experimental demonstration of high-throughput flow-through spatial atomic layer deposition of Al2O3 coatings on textiles at atmospheric pressure
MBM Mousa, JS Ovental, AH Brozena, CJ Oldham, GN Parsons
Journal of Vacuum Science & Technology A 36 (3), 2018
252018
Atmospheric pressure synthesis of photoluminescent hybrid materials by sequential organometallic vapor infiltration into polyethylene terephthalate fibers
HI Akyildiz, MBM Mousa, JS Jur
Journal of Applied Physics 117 (4), 2015
152015
Precise nanoscale surface modification and coating of macroscale objects: open-environment in loco atomic layer deposition on an automobile
MBM Mousa, CJ Oldham, GN Parsons
ACS applied materials & interfaces 7 (35), 19523-19529, 2015
142015
Buried power rail metal exploration towards the 1 nm node
A Gupta, D Radisic, JW Maes, OV Pedreira, JP Soulié, N Jourdan, ...
2021 IEEE International Electron Devices Meeting (IEDM), 22.5. 1-22.5. 4, 2021
132021
Thermal atomic layer deposition of Sn metal using SnCl4 and a vapor phase silyl dihydropyrazine reducing agent
EC Stevens, MBM Mousa, GN Parsons
Journal of Vacuum Science & Technology A 36 (6), 2018
132018
Hydrodynamics of a novel design circulating fluidized bed steam reformer operating in the dense suspension upflow regime
MBM Mousa, SEK Fateen, EA Ibrahim
International Scholarly Research Notices 2014 (1), 935750, 2014
52014
ALD Mo for Advanced MOL Local Interconnects
M Hosseini, D Tierno, JW Maes, C Zhu, S Datta, Y Byun, M Mousa, ...
2022 IEEE International Interconnect Technology Conference (IITC), 145-147, 2022
22022
Barrierless ALD Molybdenum for Buried Power Rail and Via-to-Buried Power Rail metallization
A Gupta, JW Maes, N Jourdan, C Zhu, S Datta, OV Pedreira, QT Le, ...
2022 IEEE International Interconnect Technology Conference (IITC), 58-60, 2022
22022
Hydrodynamic characteristics of a novel circulating fluidized bed steam reformer operating in the fast fluidization regime
MBM Mousa, SEK Fateen, EA Ibrahim
International Journal of Chemical Reactor Engineering 9 (1), 2011
22011
Selective ALD Mo Deposition in 10nm Contacts
MH van der Veen, JW Maes, OV Pedreira, C Zhu, D Tierno, S Datta, ...
2023 IEEE International Interconnect Technology Conference (IITC) and IEEE …, 2023
12023
Reactor systems and methods for cleaning reactor systems
A Mishra, JL Winkler, MB Mousa, M Muhammad, P Ma, H M'saad, YS Kuo, ...
US Patent App. 17/729,645, 2022
12022
High Throughput Atomic Layer Deposition Processes: High Pressure Operations, New Reactor Designs, and Novel Metal Processing
MM Mousa
Ph.D. Thesis, 2015
12015
Reactant delivery system and reactor system including same
J Wrench, S Zhang, AP Vashi, S Garg, TR Dunn, MB Mousa, J Bakke, ...
US Patent App. 18/403,024, 2024
2024
Method of forming structure including a doped adhesion film
MB Mousa, J Kim, LEE Jaebeom, CE Nanayakkara, P Ma, CD Wang, ...
US Patent App. 18/141,694, 2023
2023
Methods and systems for filling gap features on substrate surfaces
Y Cabrera, YC Byun, AV Ravichandran, S Luiso, SH Yu, MB Mousa
US Patent App. 18/119,884, 2023
2023
Systems and methods for cleaning and treating a surface of a substrate
YC Byun, MB Mousa, D Li, AV Ravichandran, Y Cabrera, S Luiso
US Patent App. 18/147,038, 2023
2023
The system can't perform the operation now. Try again later.
Articles 1–20