|Bouncing transitions on microtextured materials|
M Reyssat, A Pépin, F Marty, Y Chen, D Quéré
Europhysics Letters 74 (2), 306, 2006
|Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro-and nanostructures|
F Marty, L Rousseau, B Saadany, B Mercier, O Français, Y Mita, ...
Microelectronics journal 36 (7), 673-677, 2005
|A batch-fabricated and electret-free silicon electrostatic vibration energy harvester|
P Basset, D Galayko, AM Paracha, F Marty, A Dudka, T Bourouina
Journal of Micromechanics and Microengineering 19 (11), 115025, 2009
|Microfabricated textured surfaces for super-hydrophobicity investigations|
M Callies, Y Chen, F Marty, A Pépin, D Quéré
Microelectronic engineering 78, 100-105, 2005
|Electrostatic vibration energy harvester with combined effect of electrical nonlinearities and mechanical impact|
P Basset, D Galayko, F Cottone, R Guillemet, E Blokhina, F Marty, ...
Journal of Micromechanics and Microengineering 24 (3), 035001, 2014
|MEMS sensors for density–viscosity sensing in a low-flow microfluidic environment|
I Etchart, H Chen, P Dryden, J Jundt, C Harrison, K Hsu, F Marty, ...
Sensors and Actuators A: Physical 141 (2), 266-275, 2008
|Free-space tunable and drop optical filters using vertical Bragg mirrors on silicon|
B Saadany, M Malak, M Kubota, F Marty, Y Mita, D Khalil, T Bourouina
IEEE journal of selected topics in quantum electronics 12 (6), 1480-1488, 2006
|Zinc oxide nano-enabled microfluidic reactor for water purification and its applicability to volatile organic compounds|
I Azzouz, YG Habba, M Capochichi-Gnambodoe, F Marty, J Vial, ...
Microsystems & Nanoengineering 4 (1), 1-7, 2018
|Electret-free micromachined silicon electrostatic vibration energy harvester with the Bennet’s doubler as conditioning circuit|
V Dorzhiev, A Karami, P Basset, F Marty, V Dragunov, D Galayko
IEEE Electron Device Letters 36 (2), 183-185, 2015
|A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices|
Y Lu, F Cottone, S Boisseau, F Marty, D Galayko, P Basset
Applied Physics Letters 107 (25), 253902, 2015
|Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor|
B Le Foulgoc, T Bourouina, O Le Traon, A Bosseboeuf, F Marty, ...
Journal of micromechanics and microengineering 16 (6), S45, 2006
|Deep reactive ion etching of sub-micrometer trenches with ultra high aspect ratio|
J Parasuraman, A Summanwar, F Marty, P Basset, DE Angelescu, ...
Microelectronic engineering 113, 35-39, 2014
|On the optical and morphological properties of microstructured Black Silicon obtained by cryogenic-enhanced plasma reactive ion etching|
KN Nguyen, P Basset, F Marty, Y Leprince-Wang, T Bourouina
Journal of Applied Physics 113 (19), 194903, 2013
|Silica sputtering as a novel collective stationary phase deposition for microelectromechanical system gas chromatography column: Feasibility and first separations|
J Vial, D Thiébaut, F Marty, P Guibal, R Haudebourg, K Nachef, K Danaie, ...
Journal of Chromatography A 1218 (21), 3262-3266, 2011
|A vibrating edge supported plate, fabricated by the methods of micro electro mechanical system for the simultaneous measurement of density and viscosity: results for …|
ARH Goodwin, EP Donzier, O Vancauwenberghe, AD Fitt, KA Ronaldson, ...
Journal of Chemical & Engineering Data 51 (1), 190-208, 2006
|On the response of a resonating plate in a liquid near a solid wall|
C Harrison, E Tavernier, O Vancauwenberghe, E Donzier, K Hsu, ...
Sensors and Actuators A: Physical 134 (2), 414-426, 2007
|A batch-fabricated electret-biased wideband MEMS vibration energy harvester with frequency-up conversion behavior powering a UHF wireless sensor node|
Y Lu, E O’Riordan, F Cottone, S Boisseau, D Galayko, E Blokhina, F Marty, ...
Journal of Micromechanics and Microengineering 26 (12), 124004, 2016
|Fabrication of 2-D and 3-D silicon photonic crystals by deep etching|
A Chelnokov, S David, K Wang, F Marty, JM Lourtioz
IEEE Journal of Selected Topics in Quantum Electronics 8 (4), 919-927, 2002
|Thermal conductivity and thermal boundary resistance of nanostructures|
K Termentzidis, J Parasuraman, CA Da Cruz, S Merabia, D Angelescu, ...
Nanoscale research letters 6 (1), 1-10, 2011
|MEMS tunable Michelson interferometer with robust beam splitting architecture|
B Saadany, H Omran, M Medhat, F Marty, D Khalil, T Bourouina
2009 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, 49-50, 2009