Mikhail Haurylau
Mikhail Haurylau
Sr. Research Scientist, KLA-Tencor Corp.
Verified email at kla-tencor.com
Title
Cited by
Cited by
Year
On-chip optical interconnect roadmap: Challenges and critical directions
M Haurylau, G Chen, H Chen, J Zhang, NA Nelson, DH Albonesi, ...
IEEE Journal of Selected Topics in Quantum Electronics 12 (6), 1699-1705, 2006
4972006
Predictions of CMOS compatible on-chip optical interconnect
G Chen, H Chen, M Haurylau, NA Nelson, DH Albonesi, PM Fauchet, ...
Integration 40 (4), 434-446, 2007
2852007
Tunable photonic bandgap structures for optical interconnects
SM Weiss, M Haurylau, PM Fauchet
Optical Materials 27 (5), 740-744, 2005
862005
On-chip copper-based vs. optical interconnects: Delay uncertainty, latency, power, and bandwidth density comparative predictions
G Chen, H Chen, M Haurylau, NA Nelson, DH Albonesi, PM Fauchet, ...
2006 International Interconnect Technology Conference, 39-41, 2006
692006
Electrical modulation of silicon-based two-dimensional photonic bandgap structures
M Haurylau, SP Anderson, KL Marshall, PM Fauchet
Applied Physics Letters 88 (6), 061103, 2006
572006
Electrical and optical on-chip interconnects in scaled microprocessors
G Chen, H Chen, M Haurylau, N Nelson, D Albonesi, PM Fauchet, ...
2005 IEEE International Symposium on Circuits and Systems, 2514-2517, 2005
512005
Analysis of long duration traces
R Nelson, D Lawson, P Lorier
ACM SIGCOMM Computer Communication Review 35 (1), 45-52, 2005
482005
Optical properties and tunability of macroporous silicon 2‐D photonic bandgap structures
M Haurylau, AR Shroff, PM Fauchet
physica status solidi (a) 202 (8), 1477-1481, 2005
242005
Electrically tunable silicon 2-D photonic bandgap structures
M Haurylau, SP Anderson, KL Marshall, PM Fauchet
IEEE Journal of Selected Topics in Quantum Electronics 12 (6), 1527-1533, 2006
192006
System and method for apodization in a semiconductor device inspection system
JM Sullivan, G Janik, S Cui, R Runyon, D Wilk, S Short, M Haurylau, ...
US Patent 9,176,069, 2015
172015
Rhenium deposition on a silicon surface at the room temperature for application in microsystems
V Petrovich, M Haurylau, S Volchek
Sensors and Actuators A: Physical 99 (1-2), 45-48, 2002
172002
Nonlinear optical response of photonic bandgap structures containing PbSe quantum dots
M Haurylau, J Zhang, SM Weiss, PM Fauchet, DV Martyshkin, VI Rupasov, ...
Journal of Photochemistry and Photobiology A: Chemistry 183 (3), 329-333, 2006
132006
System and method to determine depth for optical wafer inspection
P Kolchin, M Haurylau, R Danen
US Patent 9,389,349, 2016
112016
Hybrid photonic crystal microcavity switches on SOI
SP Anderson, M Haurylau, J Zhang, PM Fauchet
Silicon Photonics II 6477, 647712, 2007
102007
Adjustable frame support for pre formed mold
JS Burgess
US Patent 6,923,635, 2005
102005
Electrical tuning of the silicon-based 2-D photonic bandgap structures
M Haurylau, SP Anderson, KL Marshall, PM Fauchet
Tuning the Optical Response of Photonic Bandgap Structures II 5926, 592603, 2005
62005
Tunable Porous Silicon Mirrors for Optoelectronic Applications
SM Weiss, M Haurylau, PM Fauchet
MRS Online Proceedings Library (OPL) 737, 2002
52002
Dynamically tunable 1D and 2D photonic bandgap structures for optical interconnect applications
M Haurylau, SM Weiss, PM Fauchet
Tuning the Optical Response of Photonic Bandgap Structures 5511, 38-49, 2004
42004
Determining a configuration for an optical element positioned in a collection aperture during wafer inspection
P Kolchin, M Haurylau, J Wei, D Kapp, R Danen, G Chen
US Patent 9,709,510, 2017
32017
System and method to determine depth for optical wafer inspection
P Kolchin, M Haurylau, R Danen
US Patent 9,989,479, 2018
22018
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